AFM – Atomic Force Microscopy
Atomic-force microscopy (AFM) or scanning-force microscopy (SFM) is a type of scanning probe microscopy (SPM) with a resolution in the nanometer and sub-nanometer range.
The information is gathered by "feeling" or “tapping" the surface with a mechanical probe.
Applications
- Material surface roughness measurement and structure observation
- Material surface 2D/3D pattern image
- Nanoscale depth analysis and dimensioning
Technical Specifications
Bruker - Innova AFM
- Sample Size: 45 mm x 45 mm x 18 mm
- Closed-Loop, Large-Area Scanner XY >90 µm, Z >7.5 µm
- Open-Loop, Small-Area Scanner XY >5 µm, Z >1.5 µm
- Z Noise Floor <50 pm RMS, typical imaging bandwidth
- Closed-Loop XY Noise <1.2 nm RMS, typical imaging bandwidth
- Z Linearizer Noise <200 pm RMS, typical imaging bandwidth
- Open-Loop XY Drift <1 nm/min
- Closed-Loop WY Drift <3 nm/min
Contact
Chemical and Physical Analytics
E-Mail: Analytic.SWM@osram.com
Chemical and Physical AnalyticsMittelstetter Weg 2, 86830 Schwabmünchen